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核心組成部分

Vacuum & Pressure Control Module

● Dry screw vacuum pumps (ultimate vacuum ≤5 kPa)

● Pressure stabilization system: PID automatic adjustment (±1% fluctuation)

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Overview

Vacuum Pump Unit
Utilizes oil-free dry screw vacuum pumps achieving ultimate vacuum ≤5 kPa (abs). Features corrosion-resistant titanium alloy rotors paired with ceramic-coated chambers for contamination-free, low-noise operation. Capable of continuous suction of micro-particle-laden gases, ideal for clean-critical applications like pharmaceutical solvent recovery and electronic specialty gas handling.


Pressure Stabilization System
Integrates high-precision PID (Proportional-Integral-Derivative) algorithms with rapid-response valve assemblies for real-time pressure regulation. The multi-stage damping design enables full-range control from vacuum to positive pressure, ensuring evaporation process stability. Meets stringent pressure-critical requirements for industrial applications like fine chemical synthesis and high-purity material manufacturing.

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